In MEMS capacitive microphone design, it is very critical to get highest yielding rate and sensitivity as the two major factors dominate structure design of microphone. The centralpost MEMS microphone is introduced in this paper to differentiate from traditional fixed membrane boundary microphone since the construction is simple and only few masks are required in the process so that the yielding can be greatly enhanced. Thus, it is necessary to find the relationship between the sensitivity and dimension of the diameter of the membrane. The main research steps described in this paper include using CoventorWarer to develop one analysis model of MEMS microphone with coupled electro-mechanic system and analyzing the relationship between the sensitivity and the dimension of the diameter of the membrane
"THE SENSITIVITY ANALYSIS OF A MEMS MICROPHONE WITH DIFFERENT MEMBRANE DIAMETERS,"
Journal of Marine Science and Technology: Vol. 18
, Article 2.
Available at: https://jmstt.ntou.edu.tw/journal/vol18/iss6/2